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Introduction to CVD Diamond
Key Equipment for CVD Diamond Growth
CVD reactors are critical for diamond synthesis, with temperature control and heating methods being paramount. Main CVD systems include:
lHot Filament CVD (HFCVD)
lPlasma-Enhanced CVD (PECVD):
·Microwave Plasma CVD (MPCVD)
·DC Arc Plasma Jet CVD
lCombustion Flame CVD
Growth Mechanism of CVD Diamond
CVD diamond synthesis involves decomposing carbon-containing precursors (e.g., methane) in a hydrogen-rich reducing atmosphere. Key processes:
lCarbon Source: Methane provides carbon atoms.
lAtomic Hydrogen:
1. Maintains single-bond diamond structure
2. Etches non-diamond carbon phases (graphite/amorphous carbon)
3. Creates surface reactive sites
lGas Mixtures: Methane-hydrogen base, with optional additives (Ar, N₂, O₂) to enhance growth rate/crystal quality.
CVD Process Overview
Chemical Vapor Deposition involves gas-phase and surface reactions. In a standard process:
lSubstrates are exposed to volatile precursors (e.g., CH₄/H₂).
lPrecursors decompose/react on the substrate surface.
lDesired components deposit while byproducts are removed via gas flow.
The CVD diamond synthesis workflow is illustrated in the diagram：
